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Sic prevlečen ICP jedkanica
  • Sic prevlečen ICP jedkanicaSic prevlečen ICP jedkanica

Sic prevlečen ICP jedkanica

VETEKSMICON SIC prevlečen ICP jedkanica je zasnovana za najzahtevnejše aplikacije Epitaxy Oprema. Naš nosilci ICP jedkanic z ICP je izdelani iz kakovostnega grafitnega materiala z ultra napolnim grafitnim materialom zelo ravno površino in odlično korozijsko upornost, da med rokovanjem prenesejo močne razmere. Visoka toplotna prevodnost nosilca, prevlečenega s SIC, zagotavlja enakomerno porazdelitev toplote za odlične rezultate jedkanja.

With years of experience in production SiC Coated ICP Etching Carrier,VeTek Semiconductor can supply a wide range of SiC coated or TaC coated spare parts for semiconductor industry. In addition to the product list below, you can also customize your own unique SiC coated or TaC coated parts according to your specific needs.Welcome to inquiry us.


VeTek Semiconductor's SiC Coated ICP Etching Carrier, also known as ICP carriers, PSS carriers, RTP carriers, or RTP carriers, are important components used in a variety of applications in the semiconductor industry. Silicon carbide coated graphite is the primary material used to manufacture these current carriers. It has high thermal conductivity, more than 10 times the thermal conductivity of sapphire substrate. This property, combined with its high roller electric field strength and maximum current density, has prompted the exploration of silicon carbide as a potential replacement for silicon in a variety of applications, particularly in semiconductor high-power components. SiC current carrier plates have high thermal conductivity, making them ideal for LED manufacturing processes. 


They ensure efficient heat dissipation and provide excellent electrical conductivity, contributing to the production of high-power leds. In addition, these carrier plates have excellent plasma resistance and long service life, ensuring reliable performance and life in the demanding semiconductor manufacturing environment.


Veteksemicon has established long-term cooperative relationships with many semiconductor manufacturers.We also look forward to building a long-term partnership with you.


Product parameter of the SiC Coated ICP Etching Carrier:

Basic physical properties of CVD SiC coating
Property Typical Value
Crystal Structure FCC β phase polycrystalline, mainly (111) oriented
Density 3.21 g/cm³
Hardness 2500 Vickers hardness(500g load)
Grain SiZe 2~10μm
Chemical Purity 99.99995%
Heat Capacity 640 J·kg-1·K-1
Sublimation Temperature 2700℃
Flexural Strength 415 MPa RT 4-point
Young' s Modulus 430 Gpa 4pt bend, 1300℃
Thermal Conductivity 300W·m-1·K-1
Thermal Expansion(CTE) 4.5×10-6K-1


VeTek Semiconductor SiC Coated ICP Etching Carrier Production Shop

VeTek Semiconductor SiC Coated ICP Etching Carrier Production Shop


Overview of the semiconductor chip epitaxy industry chain:

Overview of the semiconductor chip epitaxy industry chain


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Za vprašanja o prevleki iz silicijevega karbida, prevleki iz tantalovega karbida, posebnem grafitu ali ceniku, nam pustite svoj e-poštni naslov in kontaktirali vas bomo v 24 urah.
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